Abstract:Hydrogen sensors have been widely used in several fields for monitoring the concentration of hydrogen and for its alarming leakage. In this study, a microelectromechanical systems (MEMS)-based resistive hydrogen sensor using a palladium-gold (Pd-Au) alloy thin film was developed, which has the advantages of low power consumption, mass production, and high performance. A sensitive alloy film was prepared by DC magnetron sputtering deposition and annealed at various temperatures. It was integrated on a patterned silicon substrate with heating and temperature detection resistances and fabricated by MEMS processes. This film exhibited the best response performance to hydrogen at annealing and working temperatures of 200 and 60 degrees C, respectively. The sensor exhibited a good response to hydrogen from 5 ppm to 3%. The response attained a value of 3.3%, and the response and recovery times were 22 and 160 s, respectively, for a hydrogen concentration of 3%. The sensor also indicated good repeatability, long-term stability, and high selectivity for hydrogen over other gases (sulfur dioxide, ethanol, methane, ammonia, carbon monoxide, nitrogen dioxide, and formaldehyde). Thus, it has good potential for the detection of hydrogen leakage in new energy vehicles.

Hydrogen Sensors Based on Ni/Sio2/Si Mos Capacitors

MOS hydrogen sensor with very fast response based on ultra-thin thermal SiO2 film

Ultra-high Sensitive Micro-Chemo-mechanical Hydrogen Sensor Integrated by Palladium-Based Driver and High-Performance Piezoresistor

Flexible and Highly Sensitive Hydrogen Sensor Based on Organic Nanofibers Decorated by Pd Nanoparticles

Hydrogen Sensor Based on NTC Thermistor with Pt-Loaded WO<sub>3</sub>/SiO<sub>2</sub> Coating

Hydrogen Sensor Based on NTC Thermistor with Pt-Loaded WO3/SiO2 Coating

MOSFE-Capacitor Silicon Carbide-Based Hydrogen Gas Sensors

ACCELERATING HYDROGEN SENSING WITH Pd-MOS CAPACITORS USING ACTIVE CONTROLS OF TRAPPED CHARGE

A Ppb-level Hydrogen Sensor Based on Activated Pd Nanoparticles Loaded on Oxidized Nickel Foam

High-temperature Hydrogen Sensor Based on Platinum Nanoparticle-Decorated SiC Nanowire Device

Hydrogen sensor with ppb-level detection limit prepared by Pd-modified and Bi-doped oxidized Ni foam

Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge.

Flexible Hydrogen Sensor Based on Pd/TiO2 Nanofilm with Fast Response

Hydrogen Gas Sensor Based on Mesoporous In2O3 with Fast Response/recovery and Ppb Level Detection Limit

Study of a New Hydrogen Gas Sensor Synthesized With a Sputtered Cerium Oxide Thin Film and Evaporated Palladium Nanoparticles

MEMS-based Resistive Hydrogen Sensor with High Performance Using a Palladium-Gold Alloy Thin Film

Hydrogen detecting characteristics of a palladium nanoparticle/indium gallium oxide based sensor

CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD-Aluminum Oxide

The distinguished hydrogen sensibility by selecting diameters of single-walled carbon nanotubes and adding sensitive materials

Hydrogen sensing by sol-gel grown NiO and NiO:Li thin films

A Temperature-Stable Pd Nanofilm Hydrogen Sensor with a Wheatstone Bridge Structure