Feasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysis1This paper was published on the Special Issue from the BCEIA Conference in Shanhhai, China, October 1997.1

Yongxuan Su,Pengyuan Yang,Zhen Zhou,Xiaoru Wang,Fumin Li,Benli Huang,Jianshi Ren,Ming Chen,Hongbo Ma,Gongshu Zhang

DOI: https://doi.org/10.1016/S0584-8547(98)00143-8

1998-01-01

Abstract:This work evaluates the possibilities of applying microsecond-pulse glow discharge time of flight mass spectrometry (mu s-pulse GD-TOFMS) in surface depth analysis. Investigations have been done for effects of discharge pressure on sputtered depth profiles as well as on topographies under mu s-pulse GD mode; and also for influences of discharge current and discharge frequency on characteristics of sputtered surface. Sputtering rates of several pure metals under mu s-pulse GD and dc-GD modes were studied and compared. The estimated erosion rates are 1.27, 2.90 and 5.18 nm s(-1) for pure Fe, Cu and Zn layer, respectively. Depth profiling were conducted for a technical Zr-Fe layer (about 10 mu m) and for a Fe-Cu layer (about 1 mu m) by mu s-pulse GD. A simple model was developed and utilized to convert ion intensity into element concentration, and the experimental results were presented and discussed. Preliminary results show that mu s-pulse GD-TOFMS has a promising future in the area of surface depth analysis, especially in the depth analysis of thin layers and of their cross-sections. (C) 1998 Elsevier Science B.V. All rights reserved.