Thermal Atomic Layer Deposition of Gold: Mechanistic Insights, Nucleation, and Epitaxy
Pengfei Liu,Yuchen Zhang,Cong Liu,Jonathan D. Emery,Anusheela Das,Michael J. Bedzyk,Adam S. Hock,Alex B. F. Martinson
DOI: https://doi.org/10.1021/acsami.0c17943
2021-02-09
Abstract:An <i>in situ</i> microbalance and infrared spectroscopic study of alternating exposures to Me<sub>2</sub>Au(S<sub>2</sub>CNEt<sub>2</sub>) and ozone illuminates the organometallic chemistry that allows for the thermal atomic layer deposition (ALD) of gold. <i>In situ</i> quartz crystal microbalance (QCM) studies resolve the nucleation delay and island growth of Au on a freshly prepared aluminum oxide surface with single cycle resolution, revealing inhibition for 40 cycles prior to slow nucleation and film coalescence that extends over 300 cycles. <i>In situ</i> infrared spectroscopy informed by first-principles computation provides insight into the surface chemistry of the self-limiting half-reactions, which are consistent with an oxidized Au surface mechanism. X-ray diffraction of ALD-grown gold on silicon, silica, sapphire, and mica reveals consistent out-of-plane oriented crystalline film growth as well as epitaxially directed in-plane orientation on closely lattice-matched mica at a relatively low growth temperature of 180 °C. A more complete understanding of ALD gold nucleation, surface chemistry, and epitaxy will inform the next generation of low-temperature, nanoscale, textured depositions that are applicable to high surface area supports.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c17943?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c17943</a>.<sup>1</sup>H NMR spectrum of Me<sub>2</sub>Au(S<sub>2</sub>CNEt<sub>2</sub>), zoom figure of thickness and growth rate change of Au ALD, calculation of average MW of X group(s), the results of CO treatment experiment, FTIR spectra of Me<sub>2</sub>Au(S<sub>2</sub>CNEt<sub>2</sub>) and NaS<sub>2</sub>CNEt<sub>2</sub>·3H<sub>2</sub>O, FTIR spectra of a whole ALD cycle, rocking curve, AFM figures of the potential epitaxial growth samples, the Ewald sphere construction of Au on mica, computationally predicted vibrations, and part of calculated peaks in Me<sub>2</sub>Au(S<sub>2</sub>CNEt<sub>2</sub>) FTIR spectrum (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c17943/suppl_file/am0c17943_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.
materials science, multidisciplinary,nanoscience & nanotechnology