Research on Calibrating Feedforward Mass & Motor Constant for Linear Driving System

Wei TENG,Yun-fei ZHOU,Qing-jie ZHU
DOI: https://doi.org/10.3969/j.issn.1001-2095.2009.05.010
2009-01-01
Abstract:A novel acceleration feedforward control strategy and a calibration algorithm on feedforward mass and motor constant were proposed for linear driving system. First, a comparison was done between the conventional feedforward control and the novel one about the advantages and disadvantages. Then, a motion control system for linear driving was described. And a calibration algorithm on feedforward mass and motor constant was proposed to compensate the disadvantages in conventional feedforward control. Experimental results demonstrate that this algorithm can enhance the dynamic response and steady characteristic to satisfy the requirements of high velocity and high precision. This algorithm has already been applied in semiconductor manufacturing equipments supported by linear driving.
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