Influence of the Mn Concentration on the Electromechanical Response D33 of Mn‐doped ZnO Films

J. T. Luo,X. Y. Zhu,G. Chen,F. Zeng,F. Pan
DOI: https://doi.org/10.1002/pssr.201004209
2010-01-01
Abstract:The influence of Mn concentration on the electromechanical response d(33) of Mn-doped ZnO films has been investigated. It is found that d(33) decreases slightly with the increase of Mn concentration until 4.8 at%, and then increases rapidly with Mn concentration increasing further. The maximum d(33) value of similar to 86 pC/N is obtained in Zn0.913Mn0.087O films. When the Mn concentration exceeds 8.7 at%, d(33) turns to decrease. We suggest that Mn valence and ionic size in Mn-doped ZnO films play important roles in the electromechanical response. The improved piezoelectric properties could make Mn-doped ZnO a promising candidate for piezoelectric devices.
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