Anisotropic Acoustodynamics in Gigahertz Piezoelectric Ultrasonic Transducers
Jingjie Cheng,Zhaoliang Peng,Penghui Song,Bo Peng,Jason J. Gorman,Justin Kuo,Amit Lal,Wenming Zhang,Lei Shao
DOI: https://doi.org/10.1109/led.2022.3179205
IF: 4.8157
2022-07-02
IEEE Electron Device Letters
Abstract:In this work, we employed our newly developed optical imaging method to probe detailed acoustodynamic physics in gigahertz unreleased ultrasonic transducers based on an AlN-on-silicon system, revealing mode superposition, anisotropic transduction, and dynamic mode evolution. Superpositioned upon the dominant breathing mode along the vertical direction of the AlN layer, multiple resonant lateral modes are identified, and they are shown to evolve into a surface mode beyond the piezoelectric transduction envelope, with strong anisotropic transduction brought by the shear motion of silicon. This acoustodynamic property is important for verifying and further improving design theories of broadband piezoelectric transducers and thin film piezoelectric-on-substrate systems in general.
engineering, electrical & electronic