3-D microarrays biochip for DNA amplification in polydimethylsiloxane (PDMS) elastomer

Xiaomei Yu,Dacheng Zhang,Ting Li,Lin Hao,Xiuhan Li
DOI: https://doi.org/10.1016/S0924-4247(03)00370-4
2003-01-01
Abstract:In this paper, a rapid and low-cost fabrication technique for microarrays biochips is presented, and the fluorescence-based polymerase chain reactions (PCR) were performed in the chip for DNA amplification. The chip is consisted of 1064 column chambers. Each chamber has a volume of 25nl, with the diameter of 460μm and depth of 200μm. The PCR chips were made of inexpensive silicone elastomer—polydimethylsiloxane (PDMS) and rapidly fabricated with micro-molding technique. The three-dimensional (3-D) PDMS replicas were molded directly from 3-D negative silicon master, which was fabricated by deep etching technique under the inductively coupled plasma (ICP) system. We demonstrated that the fluorescence-based PCR could be performed in the PDMS chip with nanoliter-volumes.
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