Release of Perfluorooctane Sulfonate (PFOS) from Semiconductor Manufacturing Site and Environmental Concentration Estimation and Environmental Risk Assessment of PFOS Near Semiconductor Manufacturing Site

刘超,胡建信,刘建国
DOI: https://doi.org/10.3969/j.issn.1671-1815.2008.11.031
2008-01-01
Abstract:As a newly identified persistent organic pollutant, PFOS has become a subject of many recent investigations. One main use of PFOS is in semiconductor manufacturing. According to EU Technical Guidance Document and EUSES model, the release of PFOS from semiconductor manufacturing site and environmental concentration of PFOS near semiconductor manufacturing site are estimated, and aquatic environmental risk assessment is performed.
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