Design on the Vacuum Provide System for CMP

周国安

DOI: https://doi.org/10.3969/j.issn.1004-4507.2011.08.003

2011-01-01

Abstract:The paper gives a whole design by pneumatic、hardware and software aspect according to the special requirement of vacuum system for low throughput and Lab which is:(1) Sustained and stable vacuum providing;(2) Dealing with the backflow fluid on time;(3) Vacuum motor can not work for long time without break.To increase separate vacuum tank and drain tank in my design,the both tank will be connected together in order to make the volume bigger under the normal condition,Meanwhile the drain tank can collect the backflow fluid.The system can keep provide vacuum continually even though during draining the fluid period;To increase the SMC switch and controlling system,which can confirm to provide the vacuum between the max and min setting value,and achieve the vacuum motor by intermission working style.The design solves the problems above thoroughly,besides the control system is simple and reliable,all of these can meet the production.