Abstract:This paper presents the analysis of an orthogonal multi-beam Lloyd's mirror interferometer for fabrication of two-axis gratings, which is employed as a measurement standard. Conventionally, for the fabrication of such complicated micro patterns, ultra-precision turning with a fast tool servo or lithography process with masks has been employed. However, they require long machining or fabrication time. Meanwhile, laser interference lithography such as the Lloyd's mirror interferometer is expected as a candidate for fabrication of such periodic micro patterns. In this paper, a new optical configuration is designed based on the Lloyd's mirror interferometer. In the proposed design, differing from the one in the previous study, two mirrors and a substrate are set to be perpendicular with each other to fabricate two-axis grating patterns having both symmetric profiles and uniform depths over the wide fabrication area, which has been difficult to be achieved in the previous study. A design and fabrication of the optical configuration for the orthogonal multi-beam Lloyd's mirror interferometer, and some experimental results with the interferometer will be reported.

Optical low-coherence reflectometry based on long-period grating Mach-Zehnder interferometers

Low-Coherence Interrogation Scheme for Multiplexed Sensors Based on Long-Period-Grating Mach-Zehnder Interferometers

Coherence Multiplexing of Sensors Based on Long-Period Fibre Grating Mach-Zehnder Interferometers

Multiplexing Scheme for Self-Interfering Long-Period Fiber Gratings Using A Low-Coherence Reflectometry

Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings

Wavelength Detection of Coherence-Multiplexed Fiber-Optic Sensors Based on Long-Period Grating Pairs

Implementation and Characterization of Liquid-Level Sensor Based on a Long-Period Fiber Grating Mach–Zehnder Interferometer

Multiplexing Scheme of Long-Period Grating Sensors Based on a Modified Optical Frequency Domain Reflectometry

Mach-Zehnder Interferometer In Embedded-Core Optical Fiber

Mode-Coupling and Propagation in a Deeply-Tapered Few-Period Long-Period Fiber Grating

Optical Coherence-Multiplexed Sensors Based on In-Fiber Michelson

Optical low-coherence reflectometry for a distributed sensor array of fiber Bragg gratings

In-Fiber M-Z Interferometer Based on Cascaded Long Period Gratings in Embedded-Core Fiber

Distributed Sensing System Of Optical Low-Coherence Reflectometry Using An Array Of Identical Fiber Bragg Gratings

Compact Long Period Fiber Grating Based on Periodic Micro-Core-Offset

Low Coherent Optical Frequency Domain Reflectometry Interrogates Fiber Bragg Grating Sensors

Fabrication of A Compact Reflective Long-Period Grating Sensor with A Cladding-Mode-Selective Fiber End-Face Mirror

Mechanically Induced Long-Period Fiber Grating Couplers

Multiplexing Optical Fiber Low Coherence and High Coherence Interferometric System with Large Range and High Resolution for On-Line Measurement

Long Period Fiber Gratings Inscribed With an Improved Two-Dimensional Scanning Technique

Fiber-Taper Seeded Long-Period Grating Pair As A Highly Sensitive Refractive-Index Sensor