Research on Steady State Characteristic of Vacuum Pre-load Aerostatic Bearing

Zheng Chen,Jianjun Du
DOI: https://doi.org/10.3969/j.issn.0254-0150.2013.04.002
2013-01-01
Abstract:Based on programmable analysis of simulation model of orifice restrictor vacuum pre-load aerostatic bearing by using MATLAB,the effects of the following factors on steady state characteristics of bearing were analyzed,such as the pressure distribution condition of bearings,vacuum chamber area ratio,orifice diameter,the number of orifice and supply gas pressure,etc.The simulation calculation shows that the area ratio of vacuum chamber between 1/6 and 1/3 can get good achievement,and better steady state characteristic can be achieved through adjusting orifice diameter,changing the number of orifice and supply gas pressure when the size of bearing structure is fixed,besides,the stiffness of bearing can be improved with vacuum pre-load.The experiments on the capacity ability of sample were done in experimental platform built.The result shows that the experimental values is consistent with the values of simulation,which further shows the feasibility of vacuum pre-load.
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