Abstract:Microelectrodes are used in microfluidic devices for a variety of purposes such as heating, applying electric fields, and electrochemical sensing. However, they are still manufactured by expensive deposition techniques such as sputtering or evaporation and patterned using photolithography methods. More recently, alternate methods including nanoparticle sintering and use of liquid metal flowing through microchannels have been used to fabricate microelectrodes. These methods are limited in the material choices or require post processing to be integrated into microchannels. Here we developed a low-cost and versatile method to integrate high-quality metal microwires into polydimethylsiloxane (PDMS) using xurography. The microwire integration process includes cutting slit pattern on PDMS substrate and subsequent writing metal microwires into the slit pattern using a specialized tip. Then the microwire-integrated PDMS was sealed/bonded using uncured PDMS prepolymer. This method enables integration of metal microwires of diameter as small as 15 μm into PDMS devices. Integration of multiple microwires with minimum spacing of 150 μm has also been demonstrated. The versatility of this method is demonstrated by the fabrication of metal microwire suspended in the middle of the microchannel, which is difficult to achieve using conventional electrode fabrication methods. This low-cost method avoids expensive clean room fabrication yet producing high-quality electrodes and can be used in a variety of microfluidic and MEMS applications.

Electrochemical Fabrication of Conducting Polymer Nanowires in an Integrated Microfluidic System.

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Preparation, modification, morphology tailor and application of conjugated conductive polymer in chemical sensors

Single metal and conducting polymer nanowire sensors for chemical and DNA detections

Electric-Field-Driven Localization of Molecular Nanowires in Wafer-Scale Nanogap Electrodes

Fabrication of PMMA Nanofluidic Electrochemical Chips with Integrated Microelectrodes.

Incorporating Microbial Pilin-Based Nanowires into a Water-Stable Electronic Polymer Composite

Self-aligned nanolithography by selective polymer dissolution.

Low-cost and versatile integration of microwire electrodes and optical waveguides into silicone elastomeric devices using modified xurographic methods

Fabrication of Polypyrrole Wires Between Microelectrodes.

Elaborately programmed nanowires fabricated using a tapered push-pull nozzle system.

Simple electrochemical route to nanofiber junctions and dendrites of conducting polymer.

Metal nanoparticle wires formed by an integrated nanomolding-chemical assembly process: fabrication and properties.

Uv-Nanoimprint Lithography As A Tool to Develop Flexible Microfluidic Devices for Electrochemical Detection

Conductive polymer nanowire gas sensor fabricated by nanoscale soft lithography

Microfabrication of A Digital Microfluidic Platform Integrated with an On-Chip Electrochemical Cell

Fast Electrochemical Netting of Composite Chains for Transferable Highly Conductive Polymeric Nanofilms.

Selective Fabrication of Nanowires with High Aspect Ratios Using a Diffusion Mixing Reaction System for Applications in Temperature Sensing

Controllable Fabrication of Percolative Metal Nanoparticle Arrays Applied for Quantum Conductance-Based Strain Sensors

Continuous and Patterned Conducting Polymer Coatings on Diverse Substrates: Rapid Fabrication by Oxidant-Intermediated Surface Polymerization and Application in Flexible Devices

Creating In‐Plane Metallic‐Nanowire Arrays by Corner‐Mediated Electrodeposition