Abstract:Hollow‐core (HC) optical microcavities differ from conventional ones in that they can strongly confine light in air. HC cavities simultaneously possessing high air–energy ratios (αair), high quality factors (Q), and small mode volumes (Veff) may enable on‐chip low‐concentration molecular sensing, high optical power delivery or storage, and low‐threshold optical oscillation or lasing when filled with materials of desirable nonlinearities. However, designing and fabricating such cavities has been challenging, especially when using only a small number of layers. Here, the design and fabrication of such an HC cavity in a three‐layer silicon photonic crystal (PhC) is reported. It supports a transverse magnetic (TM) cavity mode with αair ≈ 67% and Q ≈ 1.7 × 105 in the 1550 nm wavelength range. The in‐plane confinement is provided by the 2D photonic bandgap (PBG) of a dielectric rod array, while a pair of capping slabs with air–hole PhC patterns confine light in air in the vertical direction. The cavity allows detection of low‐concentration substances that induce refractive index changes as small as around 8.8 × 10−6. The proposed cavity design and its fabrication provide a new approach to three‐dimensional photonic confinement using a structure consisting of only a few layers.

Three kinds of compact thin subwavelength cavity resonators containing left-handed media: rectangular, cylindrical, spherical

Localized High-Q Modes in Conical Microcavities

Compact cross-coupled circular cavity filters using multilayer substrate integrated waveguide

Ultra-Compact, Subwavelength and Single-Mode Cavity Resonator

Subwavelength Rectangular Cavity Partially Filled with Left-Handed Materials

Stability And Quality Factor Of A One-Dimensional Subwavelength Cavity Resonator Containing A Left-Handed Material

Diffractive Broadband Coupling into High-Q Resonant Cavities

Planar sub-wavelength cavity resonator containing a bilayer of anisotropic metamaterials

Left-Handed Materials Based on Crystal Lattice Vibration

Dielectric Resonances of the Cylindrical Micro/nano Cavity Within Epsilon-Near-zero Materials.

Design of resonators using materials with negative refractive index

Birefringent whispering gallery cavities designed by linear transformation optics

A Hollow‐Core Optical Cavity Built in a Three‐Layer Silicon Photonic Crystal

Left-handed Materials Composed of Only S-shaped Resonators.

Compact inductor-capacitor resonators at sub-gigahertz frequencies

Output Properties of a cube corner arrays resonator

Phase compensating effect in left-handed materials

Elimination of Chirality in Three-Dimensionally Confined Open-Access Microcavities

On subwavelength and open resonators involving metamaterials of negative refraction index

Experimental Realization of A One-Dimensional Lhm-Rhm Resonator

Multilayer Structures As Negative Refractive and Left-Handed Materials.