Resist-Free Micropatterning of Binary Polymer Brushes on Si(100) Via Surface-Initiated Living Radical Polymerizations

F. J. Xu,E. T. Kang,K. G. Neoh
DOI: https://doi.org/10.1039/b604410g
2006-01-01
Journal of Materials Chemistry
Abstract:Binary polymer brushes were micropatterned, with the aid of a photomask and in the absence of any microlithographic resist, on Si(100) via consecutive surface-initiated atom transfer radical polymerization (ATRP) and reversible addition-fragmentation chain-transfer polymerization (RAFTP). The ATRP initiator was first micropatterned onto the hydrogen-terminated Si(100) surface via UV-induced hydrosilylation through a photomask. The azo initiator for RAFTP was coupled to the unhydrosilylated and re-oxidized microdomains. The orthogonal surface chemistries, that resulted after the single photochemical reaction step, allowed the spatially controlled immobilization of binary polymer brushes on an oriented single crystal silicon surface.
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