Application Study of PECVD Design Based on Improving DFMEA

Wu Xiao-song,Chu Xue-ning,Cheng Hui
DOI: https://doi.org/10.3969/j.issn.1006-2343.2013.03.012
2013-01-01
Abstract:DFMEA is an important method of reliability assurance and preventive quality,which investigates and assesses all possible failure modes of a system during the earliest development phases.However,product design is a process of meeting multi-constraints which isn't considered by the existing DFMEA.So,a model of Priority-ideal matrix and DFMEA integration is proposed for the severity assessment of FMEA,by which the feature,cost,time and potential are considered in order to eliminate the shortcomings of the existing DFMEA.The design process and template of the proposed method is developed for PECVD(Plasma Enhenced Chemical Vapor Deposition) design,which is finally illustrated to prove the feasibility of the proposed method.
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