Fast pulsing plasma immersion ion implantation for tribological applications

X.B Tian,Z.M Zeng,B.Y Tang,T.K Kwok,P.K Chu
DOI: https://doi.org/10.1016/S0257-8972(00)00652-6
2000-01-01
Abstract:Fast pulsing, low voltage plasma immersion ion implantation (FLPIII) is an effective surface modification technique for metals. Low voltage Pill features high ion current density and the ability to treat components possessing an irregular shape. In this process, a high temperature can be attained at an average to high ion flux enabling fast diffusion of the implanted species and the formation of a thick modified laver. An experimental investigation of FLPIII into AISI304 and mild steels is described. The resulting surface microhardness is much higher, and the friction coefficient as well as wear rate are dramatically reduced on account of the formation of new phases in the near surface. Our experimental results also demonstrate that FLPIII increases the critical load of the materials. Combining the non-line-of-sight advantage that enables efficient processing of samples with an irregular geometry, this method has large commercial potential. (C) 2000 Elsevier Science S.A. All rights resented.
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