Vacuum Ultraviolet Light Source Using Electrodeless Discharge

CL SHAO,T JIMBO,M UMENO,S HATTORI
DOI: https://doi.org/10.1143/jjap.25.64
IF: 1.5
1986-01-01
Japanese Journal of Applied Physics
Abstract:A new type of vacuum ultraviolet light source employing electrodeless pulse discharge was studied, and the discharge conditions needed to obtain stable VUV radiation were investigated. The argon discharge spectra between 50 nm and 110 nm were studied, and the number of photons detected through a monochromator was estimated to be 2.5×1011 cm-2s-1 at a photon energy of 13.48 eV, a pressure of 5 mTorr of argon, and a flow rate of 12 cm3/min.
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