Abstract:Nanostructured films have been widely used for preparing various advanced thin-film devices because of their unique electrical, optical, and plasmonic characteristics associated with the nano-size effect. In situ, nondestructive and high-resolution characterization of nanostructured films is essential for optimizing thin-film device performance. In this work, such thin-film characterization was achieved using a hyperspectral dark-field microscope (HSDFM) that was constructed in our laboratory by integrating a hyperspectral imager with a commercial microscope. The HSDFM allows for high-resolution (Δλ = 0.4 nm) spectral analysis of nanostructured samples in the visible-near-infrared region with a spatial resolution as high as 45 nm × 45 nm (corresponding to a single pixel). Four typical samples were investigated with the HSDFM, including the gold nanoplate array, the self-assembled gold nanoparticle (GNP) sub-monolayer, the sol-gel nanoporous titanium dioxide (TiO2) film, and the layer-stacked molybdenum disulfide (MoS2) sheet. According to the experimental results, the plasmon resonance scattering bands for nanoplate clusters are identical with those for individual gold nanoplates, indicating that the gap between adjacent nanoplates is too large to allow plasmonic coupling between them. A different case was observed with the self-assembled GNP sub-monolayer in which the aggregated clusters with the internal plasmonic interaction show a considerable red-shift of the plasmon resonance band relative to the isolated single GNP. In addition, the protein adsorption on the nanoporous TiO2 film was observed to be inhomogeneous on the microscale, and the stepped boundaries of the MoS2 sheet were clearly observed. A quasi-linear dependence of the single-pixel light intensity on the step height was obtained by combining the HSDFM with atomic force microscopy. The minimum thickness detectable by the present HSDFM is 6.5 nm, corresponding to the 10-layer MoS2 film. The work demonstrated the outstanding applicability of the HSDFM for nanostructured film characterization.

Local Three‐Dimensional Visualization of Nanoparticle Assemblies

Three-dimensional atomic-scale structure of size-selected nanoclusters on surfaces

Atomic resolution liquid-cell transmission electron microscopy investigations of the dynamics of nanoparticles in ultrathin liquids.

High-Resolution Transmission Electron Microscopy Imaging Of Carbon Nanostructures

Superstructure of Nanoparticle Assembly by HAADF-STEM

Three-Dimensional Label-Free Observing of the Self-Assembled Nanoparticles inside a Single Cell at Nanoscale Resolution

Direct Imaging of Core-shell Structure in Ag-Au Nanoparticles

Direct Imaging of Core-Shell Structure in Silver-Gold Bimetallic Nanoparticles

Element Specific Atom Counting at the Atomic Scale by Combining High Angle Annular Dark Field Scanning Transmission Electron Microscopy and Energy Dispersive X‐ray Spectroscopy

Effects of Electron Microscope Parameters and Sample Thickness on High Angle Annular Dark Field Imaging

Three-dimensional atomic structure of supported Au nanoparticles at high temperature

Three dimensional orientational imaging of nanoparticles with darkfield microscopy.

On the visibility of very thin specimens in annular bright field scanning transmission electron microscopy

Three-Dimensional Analysis of Nanoparticles on Carbon Support Using Aberration-Corrected Scanning Confocal Electron Microscopy

Symmetry breaking of Au nanospheres confined in 1D nanocylinders: exploring helical assembly by 3D transmission electron microscopy

Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography

Three-dimensional atomic-scale structure of size-selected gold nanoclusters

Tracking Nanoparticle Diffusion and Interaction during Self-Assembly in a Liquid Cell

Direct Visualization of Photomorphic Reaction Dynamics of Plasmonic Nanoparticles in Liquid by 4D Electron Microscopy.

Structures and Optical Properties of 4-5 Nm Bimetallic Agau Nanoparticles

Spatially Resolved Spectroscopic Characterization of Nanostructured Films by Hyperspectral Dark-Field Microscopy