Abstract:Fabrication of microfluidic devices by soft lithography is by far the most popular approach due to its simplicity and low cost. The approach relies on casting of elastomers, such as polydimethylsiloxane (PDMS), on masters fabricated from photoresists on silicon substrates. These masters, however, can be expensive, complicated to fabricate, and fragile. Here we describe an optimized replica molding approach to preserve the original masters by heat molding of polycarbonate (PC) sheets on PDMS molds. The process is faster and simpler than previously reported methods and does not result in a loss of resolution or aspect ratio for the features. The generated PC masters were used to successfully replicate a wide range of microfluidic devices, including rectangular channels with aspect ratios from 0.025 to 7.3, large area spiral channels, and micropost arrays with 5 μm spacing. Moreover, fabrication of rounded features, such as semi-spherical microwells, was possible and easy. Quantitative analysis of the replicated features showed variability of <2%. The approach is low cost, does not require cleanroom setting or hazardous chemicals, and is rapid and simple. The fabricated masters are rigid and survive numerous replication cycles. Moreover, damaged or missing masters can be easily replaced by reproduction from previously cast PDMS replicas. All of these advantages make the PC masters highly desirable for long-term preservation of soft lithography masters for microfluidic devices.

NEW METHOD FOR RAPID FABRICATING MASTERS OF PDMS-BASED MICROFLUIDIC DEVICES

Rapid Prototyping of Soft Lithography Masters for Microfluidic Devices Using Dry Film Photoresist in a Non-Cleanroom Setting

A novel method for fabricating polydimethylsiloxane microfluidic chip master molds

A Polymeric Master Replication Technology for Mass Fabrication of Poly(dimethylsiloxane) Microfluidic Devices.

Milling Positive Master for Polydimethylsiloxane Microfluidic Devices: the Microfabrication and Roughness Issues.

A Simple Method For Fabrication Of Microstructures Using A Pdms Stamp

PDMS-based microfluidic device with multi-height structures fabricated by single-step photolithography using printed circuit board as masters.

Rapid Prototyping of Single-Layer Microfluidic PDMS Devices with Abrupt Depth Variations under Non-Clean-room Conditions by Using Laser Ablation and UV-curable Polymer

Fabrication of Poly(dimethylsiloxane) Microfluidic System Based on Masters Directly Printed with an Office Laser Printer.

PDMS-based microfluidic devices using commoditized PCBs as masters with no specialized equipment required

A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

Polycarbonate Masters for Soft Lithography

Rapid Prototyping of Poly(methyl Methacrylate) Microfluidic Systems Using Solvent Imprinting and Bonding.

Fabrication of Microfluidic Systems in Poly(dimethylsiloxane)

Direct, one-step molding of 3D-printed structures for convenient fabrication of truly 3D PDMS microfluidic chips

Rapid Fabrication of Plastic Microfluidic Channels Using PDMS As Hot Embossing Tools

Simplest Method for Creating Micropatterned Nanostructures on PDMS with UV Light.

Direct Optical Micropatterning of Poly(dimethylsiloxane) for Microfluidic Devices

Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application

A Low-Cost Method of Fabricating Hybrid Micro-Nano Fluidic Chip by Double-Layer PDMS Mold and UV–thermal Nanoimprinting

Novel method to mass-produce PDMS stamps based on nanoimprint