Achromatic Wave Plates for Optical Pickup Units Fabricated by Use of Imprint Lithography

XG Deng,F Liu,JJ Wang,PF Sciortino,L Chen,XM Liu
DOI: https://doi.org/10.1364/ol.30.002614
IF: 3.6
2005-01-01
Optics Letters
Abstract:We report achromatic form-birefringence wave plates for optical pickup units. Material dispersion and structure dispersion are balanced in a rigorous multilayer design. A trilayer grating using SiN chi/SiOyN/SiO2 provides easily accessible process control points and relaxed fabrication tolerance. We demonstrate precise patterning by using nanoimprint lithography on UV-curable polymers, alleviating a major fabrication challenge. The achromatic wave plates exhibit 90 +/- 3 degrees retardance and > 95% transmittance as measured by a Mueller matrix method at wavelengths of 640-800 nm. (c) 2005 Optical Society of America.
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