Abstract:As a novel technology in ultra-smooth surface machining, atmospheric pressure inductively coupled with plasma jet processing can produce plasma with high density and energy. This capability makes it a perfect medium in fully exciting the reactive gases to improve the material removal rate. This paper is directed towards using the emission spectrometer to monitor and measure the spectra of the plasma jet from 400~1 000 nm. Spectral lines with obvious peaks and large energy differences are selected from the measurement results to calculate the electron temperatures. The measured spectral data are the integrals of emission coefficients along the optical path, and the plasma has a circularly symmetry with respect to the torch axis. Abel inversion transform is employed to compute the emission coefficients of the measured spectrum. These coefficients are then applied to obtain the electron temperatures with Boltzmann plot method. The calculation results denote that the temperature profiles appear to be typically double-peak profiles as a result of the skin effect and swirling inlet flow. With the increasing of off distance, the double-peak effect decreases and the profiles become smooth. The results also indicate that the plasma fringe is somewhat deviate from the local thermodynamic equilibrium, and the applicability of Boltzmann plot method is reduced. Consequently the goodness-of-fit factors, R-Squared values, on the plasma fringe are reduced. The spectra and characteristics of the argon plasma with reactive gas CF4 are also analyzed. This mixed plasma shows bright blue-green color. The reason for the color is that some band spectra emerge between the range of 400~650 nm. These band spectra are the swan bands of diatomic C2 which is formed by the fully excitation of carbon source CF4.

Diagnosis of Electron, Vibrational and Rotational Temperatures in an Ar/N-2 Shock Plasma Jet Produced by A Low Pressure Dc Cascade Arc Discharge

Rotational and Vibrational Temperatures of Atmospheric Double Arc Argon-Nitrogen Plasma

Temperature Measurement of DC Argon Plasma Jet

Investigation on the electron density and temperature in a nanosecond pulsed helium plasma jet with Thomson scattering

Electrical and Spectroscopic Diagnostic of an Atmospheric Double Arc Argon Plasma Jet

Temperature Measurement by Optical Emission Spectroscopy of the Plasma Jet Produced by a High Velocity Plasma Spray (HVPS)

Observation of the low electron density and electron temperature in an unmagnetized cascaded arc helium plasma by laser Thomson scattering approach

Measurement of rotational and vibrational temperatures in arc plasma based on the first negative system of N-2(+)(B-2 Sigma(+)(u)-> X-2 Sigma(+)(g))

Investigation on a Low Pressure Plasma Jet in an Inductively Coupled Plasma

[Research on the Electron Temperature and Emission Spectroscopy of the Atmospheric Inductively Coupled with Plasma Processing]

Measurements of the electron temperatureh near a flat plate impinged by an argon plasma jet

Characterization Of An Atmospheric Double Arc Argon-Nitrogen Plasma Source

Investigation on the Shockwave Induced by Surface Arc Plasma in Quiescent Air

The Nature of Fluctuations in A Double Arc Argon-Nitrogen Plasma Jet

Rotational and Vibrational Temperatures of Transient Atmospheric Glow Plasma

Distribution of the Rotational Temperature of С2 Molecules in High-Temperature Regions in a Supersonic Airflow under Injecting Ethylene, Propane, and Oxygen in the Discharge Area

Study on the spark discharge plasma jet driven by nanosecond pulses

Determination of Spectroscopic Temperatures and Electron Density in Rotating Gliding Arc Discharge

Characterization of DC argon plasma jet at atmospheric pressure

Influence of Mixture Compositions on Ion Energy Distributions in Ar/N-2 Electron Cyclotron Resonance Plasma

Zero-dimensional simulations of DC ns-pulsed plasma jet in N 2 at near atmospheric pressure: validation of the vibrational kinetics