Abstract:The advent of recent technologies in the nanoscience arena requires new and improved methods for the fabrication of multiscale features ( e.g., from micro- to nanometer scales). Specifically, biological applications generally demand the use of transparent substrates to allow for the optical monitoring of processes of interest in cells and other biological materials. Whereas wet etching methods commonly fail to produce essential nanometer scale features, plasma-based dry etching can produce features down to tens of nanometers. However, dry etching methods routinely require extreme conditions and extra steps to obtain features without residual materials such as sidewall deposits (veils). This work presents the development of a gold etching process with gases that are commonly used to etch glass. Our method can etch gold films using reactive ion etching (RIE) at room temperature and mild pressure in a trifluoromethane (CHF3)/oxygen (O2) environment, producing features down to 50 nm. Aspect ratios of 2 are obtainable in one single step and without sidewall veils by controlling the oxygen present during the RIE process. This method generates surfaces completely flat and ready for the deposition of other materials. The gold features that were produced by this method exhibited high conductivity when carbon nanotubes were deposited on top of patterned features (gold nanoelectrodes), hence demonstrating an electrically functional gold after the dry etching process. The production of gold nanofeatures on glass substrates would serve as biocompatible, highly conductive, and chemically stable materials in biological/biomedical applications.

Faceting of nanoscale fingers on the (111) surface of gold

Nanostructured Gold Surfaces Fabricated with the Scanning Tunnelling Microscope

Critical stability of gold nanofingers on a zero-gradient stepped surface.

Electrochemical Fabrication of Nanoporous Gold

Beyond the Herringbone Reconstruction: Magic Gold Fingers.

Fabrication of Gold Films with Single-sided Nanostructures

Association Between Gold Grain Orientation And Its Periodic Steps Formed At The Gold/Substrate Interface

Atomic force and scanning tunneling microscopy observations of whisker crystals and surface modification on evaporated gold films

Nanostructure Fabrication with a Point Contact Formation Between a Gold Tip and a Si(111)-(7×7) Surface with an Ultrahigh Vacuum Scanning Tunneling Microscope

Ultrafast Laser-Induced Premelting and Structural Transformation of Gold Nanorod

Quasi-Two-Dimensional Gold Nanosheets with Ultrahigh Strength

Fabrication of Gold Nanostructures on Graphite Using Atomic Force Microscope

Atomic Structure of High-Index Ge Surfaces Consisting of Periodic Nanoscale Facets

Fabrication of Gold Micro- and Nanostructures by Photolithographic Exposure of Thiol-Stabilized Gold Nanoparticles

Nanocrystal Formation and Faceting Instability in Al(110) Homoepitaxy:TrueUpward Adatom Diffusion at Step Edges and Island Corners

Faceting and Nanoscale Faceting of Ge(hhl) Surfaces Around (113)

Nanofabrication of Metal Structures in Gold-Films Deposited on Mica

Periodic Folded Gold Nanostructures with a Sub-10 nm Nanogap for Surface-Enhanced Raman Spectroscopy

Surface Effect on Young’s Modulus of Sub-Two-Nanometer Gold [111] Nanocontacts

Gas-assisted Transformation of Gold from Fcc to the Metastable 4H Phase

Generating Multiscale Gold Nanostructures on Glass without Sidewall Deposits Using Minimal Dry Etching Steps