Abstract:OBJECTIVE: Foreign body response to indwelling cortical microelectrodes limits the reliability of neural stimulation and recording, particularly for extended chronic applications in behaving animals. The extent to which this response compromises the chronic stability of neural devices depends on many factors including the materials used in the electrode construction, the size, and geometry of the indwelling structure. Here, we report on the development of microelectrode arrays (MEAs) based on amorphous silicon carbide (a-SiC).APPROACH: This technology utilizes a-SiC for its chronic stability and employs semiconductor manufacturing processes to create MEAs with small shank dimensions. The a-SiC films were deposited by plasma enhanced chemical vapor deposition and patterned by thin-film photolithographic techniques. To improve stimulation and recording capabilities with small contact areas, we investigated low impedance coatings on the electrode sites. The assembled devices were characterized in phosphate buffered saline for their electrochemical properties.MAIN RESULTS: MEAs utilizing a-SiC as both the primary structural element and encapsulation were fabricated successfully. These a-SiC MEAs had 16 penetrating shanks. Each shank has a cross-sectional area less than 60 µm2 and electrode sites with a geometric surface area varying from 20 to 200 µm2. Electrode coatings of TiN and SIROF reduced 1 kHz electrode impedance to less than 100 kΩ from ~2.8 MΩ for 100 µm2 Au electrode sites and increased the charge injection capacities to values greater than 3 mC cm-2. Finally, we demonstrated functionality by recording neural activity from basal ganglia nucleus of Zebra Finches and motor cortex of rat.SIGNIFICANCE: The a-SiC MEAs provide a significant advancement in the development of microelectrodes that over the years has relied on silicon platforms for device manufacture. These flexible a-SiC MEAs have the potential for decreased tissue damage and reduced foreign body response. The technique is promising and has potential for clinical translation and large scale manufacturing.

Silicon Nitride Surface Modification and Cell Adhesion

Surface modification of silicon and related biological research

Nanoscale Neuro-Integrative Coatings for Neural Implants.

Bisepoxide-Jeffamine Microgel Synthesis and Application Toward Heterogeneous Surface Morphology for Differential Neuronal/non-Neuronal Cell Responses in Vitro.

Improvement of neural cell adherence to silicon surface by hydroxyl ion implantation

Significantly improved cell affinity of polydimethylsiloxane enabled by a surface-modified strategy with chemical coupling

Study of the Adhesion Improvement in Hippocampal Cells on Collagen/chitosan- Modified Silicon Surfaces

Fabrication and Surface-Modification of Implantable Microprobes for Neuroscience Studies

Investigating effects of silicon nanowire and nanohole arrays on fibroblasts via AFAM

Comprehensive Evaluation of Stable Neuronal Cell Adhesion and Culture on One-Step Modified Polydimethylsiloxane Using Functionalized Pluronic

Amplified Effect of Surface Charge on Cell Adhesion by Nanostructures.

Amorphous silicon carbide ultramicroelectrode arrays for neural stimulation and recording

Development of an artificial neuronal network with post-mitotic rat fetal hippocampal cells by polyethylenimine.

Neuronal and glial cell co-culture organization and impedance spectroscopy on nanocolumnar TiN films for lab-on-a-chip devices

Electrochemical Characterization of Poly-L-Lysine Coating on Indium Tin Oxide Electrode for Enhancing Cell Adhesion

Facile Use of Cationic Hydrogel Particles for Surface Modification of Planar Substrates Toward Multifunctional Neural Permissive Surfaces: An in Vitro Investigation

Enhancement and control of neuron adhesion on polydimethylsiloxane for cell microengineering using a functionalized triblock polymer.

Layer-by-layer Assembly of Polyelectrolyte Films Improving Cytocompatibility to Neural Cells.

AFM study of hippocampal cells cultured on silicon wafers with nano-scale surface topograph.

Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation.

Research on micro-nano-scale SiO2 substrate for cell immobilization