Effects of Gas Compressibility and Surface Roughness on the Flow in Microfluidic Devices

ZhaoHui Yao,PengFei Hao,XiWen Zhang
DOI: https://doi.org/10.1007/s11433-011-4292-2
2011-01-01
Abstract:With the development of the micro-electro-mechanical system (MEMS), the flow characteristics in micro-channels have drawn increasing attention. In this paper, numerical simulations are conducted to investigate the flow characteristics of compressible flow through micro-channels and micronozzles. An improved surface roughness viscosity model is used to simulate the effect of surface roughness on micro-channels flow characteristics. Using this model, better agreements between the computational results and the experimental data are found. The result indicates that the surface roughness is one of the important factors affecting the flow characteristics of gas through micro-channels. The numerical investigation on the expansion channel shows that by using the laminar model that considers surface roughness, the computational results and experimental data are consistent when Re<450, whereas deviation increases when Re>450. Based on the synthetic model with considerations of turbulence viscosity and surface roughness, the numerical results and the experimental data are identical.
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