Abstract:The upcoming High-Luminosity running phase of the LHC will require a complete replacement of the current tracking system in the CMS experiment. With the planned integrated luminosity of up to 4000Â fb âˆ’1 to be delivered to the experiments, the innermost layers of the CMS Inner Tracker (IT) will face particle fluences of up to a non-ionizing energy loss (NIEL) of Î¦eq Â =Â 3.5Â Ã— Â 10 16 Â cm âˆ’2 . Through an extensive R&D program involving multiple vendors, several pixel sensor options have been thoroughly evaluated, considering different pixel pitches and sensor cell designs. Recently, the final choices have been made. All layers, except the innermost layer of the barrel section of the IT, will be equipped with planar n-in-p sensors featuring an active thickness of 150Î1⁄4m and pixel pitches of 25Â Ã— Â 100Î1⁄4m 2 . During the initial phase of the sensor qualification campaign, the sensors were coupled with demonstrator chips (RD53A), and the modules were exposed to fluences of up to Î¦eq Â =Â 2.0Â Ã— Â 10 16 Â cm âˆ’2 , undergoing comprehensive testing at both CERN and DESY test beam facilities. In 2023, single chip assemblies, along with the first full modules incorporating the final, full-size prototype readout chip (RD53B-CMS) irradiated up to Î¦eq Â =Â 1.0Â Ã— Â 10 16 Â cm âˆ’2 , have become available and were tested at DESY. In this article, an overview of the preliminary test beam results will be provided. The studies will cover hit efficiency, spatial resolution, and noise hit occupancy for both non-irradiated samples and irradiated assemblies. The preliminary findings are in line with previous results obtained with RD53A assemblies. The measurements described in this contribution paved the way for the submission of the final readout chip and kickoff batches for planar production sensors for the Inner Tracker that have been launched recently.

The AMS Silicon Tracker Readout: Performance Results with Minimum Ionizing Particles

Operation and performance of the CMS tracker

The Silicon Microstrip Tracker for CMS

Design and performance of the silicon sensors for the CMS barrel pixel detector

Evaluation of Planar Silicon Pixel Sensors with the RD53A Readout Chip for the Phase-2 Upgrade of the CMS Inner Tracker

Study of Built-in Amplifier Performance on HV-CMOS Sensor for the ATLAS Phase-Ii Strip Tracker Upgrade

A Silicon Microstrip Tracker in Space: Experience with the AMS Silicon Tracker on STS-91

40 MHz readout of CMS silicon modules in a high intensity beam

Study of CMOS Strip Sensor for Future Silicon Tracker

Beam Test Results of the US-CMS Forward Pixel Detector

From 3D to 5D tracking: SMX ASIC-based Double-Sided Micro-Strip detectors for comprehensive space, time, and energy measurements

Investigation of HV/HR-CMOS Technology for the ATLAS Phase-II Strip Tracker Upgrade

The CMS Silicon Strip Tracker - Overview and Status

Mighty Tracker -- Performance Studies of the MightyPix for LHCb

A Fast Readout Electronic System for Accurate Spatial Detection in Ion Beam Tracking for the Next Generation of Particle Accelerators

Performance verification of the CMS Phase-1 Upgrade Pixel detector

Study of detection efficiency distribution and areal homogeneity of SiPMs

Performance of CMOS pixel sensor prototypes in ams H35 and aH18 technology for the ATLAS ITk upgrade

Radiation hardness studies of AMS HV-CMOS 350 nm prototype chip HVStripV1

Test beam results of irradiated modules for the CMS Phase-2 upgrade equipped with HPK planar pixel sensors and RD53B-CMS readout chips

A new 130nm F.E readout chip for microstrip detectors