Multi-axis Nano-positioners in Scanning Probe Microscopes

郑静琳,李玉和,廖小华,李庆祥

DOI: https://doi.org/10.3969/j.issn.1003-5311.2006.04.022

2006-01-01

Abstract:This paper reports on recent advancements of multi-axis nano-positioners in scanning probe microscopes. The actuators and flexure design of typical nano-positioning systems, including piezo-driven, electricstatic, meglev and thermally driven positioners are discussed in detail. Research focus and recent progress in this area are also presented.