Dynamics and Control Co - Simulation Study of a Duplex Pallet Changer

LUO Jian,ZHANG Ming,LUO Xin,LI Xiao-ping
DOI: https://doi.org/10.3969/j.issn.1001-2257.2012.04.010
2012-01-01
Abstract:According to the structure of a duplex pallet changer which was used in an IC manufacturing equipment,the dynamic model can be built.As the system has the characteristics of high motion freedoms,multiple control variables and complex motion path,based on the thought of modeling respectively between dynamic and control system,by building the motion simulation model in ADAMS,the control model in Matlab/Simulink,the Co-simulation of the duplex pallet changer can be realized by using the software interface of the two.Through the simulation analysis,the structure of the system can be optimized.
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