The Construction of Microelectronics Experimental Teaching Platform

Wanrong Zhang
2009-01-01
Abstract:The platform of microelectronic technology experimental teaching is presented after investigating microelectronic technology.According to the specialty characteristic,it comprises specialty basic laboratory,semiconductor fabrication practicing base and IC design practicing teaching platform.A complete microelectronic technology experimental teaching system for Beijing University of Technology would be made by the construction microelectronic technology experimental teaching platform.
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