Scale Effect on Young's Modulus of a Silicon Nano-Plate

WANG Jing,QingAn Huang,Hong Yu
DOI: https://doi.org/10.3969/j.issn.1672-6030.2007.04.002
2007-01-01
Nanotechnology and Precision Engineering
Abstract:The calculation of mechanical properties of silicon nanostructures plays an important role in developing the physical theories and computational design tools that describe the motion and operation of silicon nanodevices,and Young's modulus is the basal parameter of mechanical properties.The semi-continuum approach was used to obtain the Young's moduli of the(001) silicon nano-plate along and directions.It is shown that the Young's moduli of the silicon nano-plate along the two directions decrease with the decrease of the thickness of the nano-plate,and the decrease becomes significant when the thickness scaling down to a few tens of nanometers.The Young's moduli along the two directions approach the constants which are close to that of bulk-silicon when the thickness of nano-plate is over 50 nm.
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