A new type of three-finger micro-tweezers

Hao Xing,Yang Zhang,Wenhao Huang
DOI: https://doi.org/10.1088/0957-0233/17/3/S09
IF: 2.398
2006-01-01
Measurement Science and Technology
Abstract:A new type of three-finger micro-tweezers driven by electrostatic force is presented in this paper. The whole system consists of three-finger micro-tweezers and a specially designed high-frequency ac power supply. The three fingers are alternately driven by the power supply with a high-frequency voltage. The direction of the electrostatic forces on the fingers produced by the high-frequency voltage is gyrating between the three fingers quickly, which is equivalent to the invariable forces pointing to the geometrical centre of the micro-tweezers. The tweezers can grasp and manipulate micro objects of size in the range from 30 mu cm to 100 mu m stably.
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