Decoupling Control of an H-drive precision XY Stage

赵冶,朱煜,杨开明,潘尚峰
DOI: https://doi.org/10.3969/j.issn.1001-2265.2010.09.009
2010-01-01
Abstract:In order to get excellent synchronization for motion control of the H-drive precision XY stage with asymmetric structure driven by linear motors,decoupling control of the H-drive precision XY stage was designed by decoupling compensator and output transformation matrix.Relative gain array(RGA) was used to measure the interactions.Besides,the decoupling compensator and output transformation matrix must be parameter-varying with position of x-slide.The result of the simulation shows that the decoupling control structure can acquire good tracking property and effectively restrain the force disturbance of the H-drive.
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