Particle Swarm Optimization Algorithm and Grid Model Based Method for Parameter Optimization

LI Wen-qi,QIU Yi-ming,WANG Lei,WU Qi-di
DOI: https://doi.org/10.13195/j.cd.2012.09.10.liwq.009
2012-01-01
Abstract:To effectively provide direct and clear reference for process parameter optimization in semiconductor manufacturing field,a new method to define input parameter window is proposed based on the advantages of both particle swarm optimization(PSO) algorithm and rectangle grid model.Simulation results on standard two-dimensional multi-modal functions show the effectiveness and validity of the method.For the scenario of two input parameters,the method can provide all the domains and a series of contour meeting process requirements.Both simulation results and production validation data show that the method is an effective way for process parameter optimization.
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