Improving Damping Capacity of the Aerostatic Bearing

Dengfeng Xu,Yu Zhu,Zheng You,Ming Zhang,Ye Zhao

DOI: https://doi.org/10.3969/j.issn.1672-6030.2010.01.016

2010-01-01

Nanotechnology and Precision Engineering

Abstract:Aerostatic bearing has been used in many fields as an excellent guidance and carrying component for its properties of cleanness and near zero friction.Yet its low damping capacity in carrying direction leads to relatively slow depression of the vibration from outside and the natural micro vibration of the aerostatic bearing,which extremely affects the system′s stability and measurement accuracy.This paper presents a new structure of aerostatic bearing with addition of a top chamber,a bottom chamber and orifices in the middle.When the aerostatic bearing vibrating induces the compressed air to go through the orifices between top and bottom chamber in reciprocating way,energy of vibration can be depressed by throttling effect.Theoretical research and impulse response experiments were taken on the proposed aerostatic bearing.Both demonstrate and verify its good performance of vibration reduction as well as micro-vibration depression.Modal analysis with MEscope of the experimental data shows that damping capacity of the new structure is improved by nearly 10 times compared with that of the traditional structure of aerostatic bearing.Besides,experiments indicate that the new structure increases carrying capacity and stiffness of the aerostatic bearing to some extent.