Study on Process of Polydimethyl Siloxane Pneumatic Peristaltic Micropump

GUAN Yan-xia,WANG Hong,XU Zhang-run
DOI: https://doi.org/10.3969/j.issn.1002-1841.2009.z1.069
2009-01-01
Abstract:A polydimethyl siloxane(PDMS) pneumatic micropump is constituted of three active pneumatic micro-valves,and the transport of liquid is realized by Peristaltic working of three valves.Major factors in the fabrication of PDMS pneumatic micropumps are the formation of arc-shaped channel profiles of the liquid channel and bonding PDMS layers as well as bonding between the PDMS layer and the glass slide.AZ4620 positive photoresist was demonstrated the best performance as a positive master for producing a liquid channel with an ideal cross sectional profile.The bonding following plasma cleaning showed the best result was used as the bonding means for fabricating PDMS pneumatic micropumps.This process was demonstrated easy to operate,fast to bond.
What problem does this paper attempt to address?