Abstract:Laser-sustained plasmas (LSP), which can be utilized for a novel radiation light source, have advantages such as high irradiance, broad spectral range, and stable emission, demonstrating significant applications for wafer inspection in the field of the semiconductor industry. This paper revisited the historical development of LSP research and introduced fundamental physical processes in LSP. The mathematical description equations for LSP and methods for calculating plasma parameters are given, based on which a time-dependent two-dimensional fluid model is established with laser-thermal-hydrodynamic coupling effects. The propagation of the laser in plasmas is investigated based on the established model, and the fundamental mechanisms in LSP, including the initial evolution process, laser energy deposition, steady-state characteristics, and instability, are explored. The effectiveness of the simulation model is confirmed through comparisons with the results from high-pressure Xe LSP experiments. The findings indicate that the mode, power, F number of incident lasers, as well as parameters including components, pressure, and flow velocity of gas, influence the steady-state properties of LSPs. Under identical power and F number conditions, Gaussian mode and annular mode lasers produce LSP with different shapes and positions. Notably, under conditions of high-power annular laser incidence, large laser F numbers, and high flow velocities, the simulation results reveal temporal and spatial instability in LSP. These simulation results contribute significantly to a deeper understanding of the underlying physical mechanisms of LSP. Furthermore, they provide a theoretical basis for the design of light source systems and the optimization of multiple parameters. The impact of laser parameters on LSP properties elucidated in this study advances not only the fundamental understanding of LSP but also offers crucial insights for the design and optimization of light source systems in various applications, particularly in the field of optical detection for semiconductor wafer inspection.

Multiple-scales Analysis of Plasma Response to Intense Laser Field and Plasma Excitation

Hydrodynamics of Plasma Interaction with an Intense Laser Field

Dynamic Characteristics of Growing Modes of Raman Instability from Intense Laser Beam Propagating Through Plasma

Influence of Strong Magnetic Fields on Laser Pulse Propagation in Underdense Plasma

Anisotropic Filamentation And Modulation Of Ultra-Intense Linearly Polarized Laser Light In Overdense Plasma

Scattered field formalism in the particle-in-cell method for plasma acceleration in tightly focused ultrashort laser beams

Electron Acceleration in Combined Intense Laser Fields and Self-Consistent Quasistatic Fields in Plasma

Collective absorption of laser radiation in plasma at sub-relativistic intensities

Laboratory simulation to study the nonlinear evolution of right-hand circularly polarised wave in laser-produced plasmas

Effect of Laser Polarization on the Electron Dynamics and Photon Emission in Near-Critical-density Plasmas

Control of Laser Light by a Plasma Immersed in a Tunable Strong Magnetic Field

Multiphysics Modeling and Simulations of Laser-sustained Plasmas

Nonlinear Raman Forward Scattering Driven by A Short Laser Pulse in A Collisional Transversely Magnetized Plasma with Nonextensive Distribution

Anomalous Increase of the Density Scale Length in A Double-Frequency Laser Plasma

A Single Long Electron Bunch Detect Electromagnetic Field Evolution in Laser Plasma

Stimulated Raman Scattering Instability of a Left-Handed Circularly Polarized Laser in Strongly Axially Magnetized Plasmas

Laser-Plasma Interactions In Magnetized Environment

Convective amplification of stimulated Raman rescattering in a picosecond laser plasma interaction regime

Magnetized Laser-Plasma Interactions in High-Energy-Density Systems: Parallel Propagation

Physical Regimes of Electrostatic Wave-Wave Nonlinear Interactions Generated by an Electron Beam Propagating in a Background Plasma

The controllable super-high energetic electrons by external magnetic fields at relativistic laser-solid interactions in the presence of large scale pre-plasmas