Abstract:In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76nm when measuring a standard grating of period 3μm; the axial resolution up to 3nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.

Improved Transversal Superresolution Filters Based on Radial Birefringent Crystal

Evanescent-wave-induced Frequency Shift for Optical Superresolution Imaging.

Spatial-frequency-shift Enables Integrated Super-Resolution Microscopy: Advance and Perspective

Far-Field Superresolution Imaging via Spatial Frequency Modulation

Far‐Field Superresolution Imaging Via Spatial Frequency Modulation

A Method for Achieving Multiple Foci with Subdiffraction Resolution along the Axial Direction

Electrically Controlled Transverse Superresolution Filter with Axial Focal Shift

Resolution Enhancement and Background Suppression in Optical Super‐Resolution Imaging for Biological Applications

Advances in Sub-20-nm Fluorescence Super-Resolution Microscopy(Invited)

Optical Thin-Film Reflection Filters Based on the Theory of Photonic Crystals.

The Design and Experiments of the Super-Resolving Annular Binary Filters Based on Genetic Algorithm

A Highly Efficient Superresolving Phase Filter for a Radially Polarized Beam

Improvement of spatial resolution in confocal microscope with shifted-focus phase filter

Improved Design Method of Liquid Crystal-Based Tunable Filter

Differential confocal technology based on radial birefringent pupil filtering principle

Generation of super-resolution longitudinally polarized beam with ultra-long depth of focus using radially polarized hollow Gaussian beam

Super-Resolution Radially Polarized-Light Pupil-Filtering Confocal Sensing Technology

A STUDY ON REAL-TIME LOW-FREQUENCY SPATIAL-FILTERING PROCESS OF AN OPTICAL-IMAGE USING LINBO3-FE CRYSTAL

Diffractive superresolution elements for radially polarized light.

Creation of an Ultra-Long Depth of Focus Super-Resolution Longitudinally Polarized Beam with A Ternary Optical Element

Multiple-Wavelength Achromatic Superresolution Focusing with Optimized Constructive Interference