Controllable Nanostructures on La0.7Sr0.3MnO3 Thin Film Surfaces Formed by Scanning Tunneling Microscopy

Yun Liu,Jia Zhang
DOI: https://doi.org/10.1016/j.mee.2010.03.002
IF: 2.3
2010-01-01
Microelectronic Engineering
Abstract:Nanoscale structuring on La"0"."7Sr"0"."3MnO"3 (LSMO) thin film surfaces has been performed by scanning tunneling microscopy (STM) under ambient conditions. From line etching experiments we found that the line-depth increases in a stepwise fashion with increasing bias voltage. It also increases with decreasing scan speed and increasing scan repetition. We observed that the line-depth is an integral multiple of the LSMO out-of-plane lattice constant about 0.4nm. Lateral structure with minimum feature size of 1nm is possible to obtain. In addition, a four-level inverse-pyramid structure has been created on LSMO thin film surfaces. Our work shows the feasibility of using STM to fabricate controllable and complex nanostructures in LSMO thin film.
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