Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

Kashif M. Awan,Di Jia,Fu Li,Lan Yang,Wenbo Mao

DOI: https://doi.org/10.1364/fio.2023.jm4a.56

Abstract:We demonstrated various chip-scale lithium-niobate nonlinear-optical devices using wet etching fabrication techniques. The low-cost wet etching process achieves device performance comparable to widely used dry processes.

Physics,Engineering