Abstract:Exploiting semiconductor fabrication techniques, natural carriers of quantum information such as atoms, electrons, and photons can be embedded in scalable integrated devices. Integrated optics provides a versatile platform for large-scale quantum information processing and transceiving with photons. Scaling up the integrated devices for quantum applications requires highperformance single-photon generation and photonic qubit-qubit entangling operations. However, previous demonstrations report major challenges in producing multiple bright, pure and identical single-photons, and entangling multiple photonic qubits with high fidelity. Another notable challenge is to noiselessly interface multiphoton sources and multiqubit operators in a single device. Here we demonstrate on-chip genuine multipartite entanglement and quantum teleportation in silicon, by coherently controlling an integrated network of microresonator nonlinear single-photon sources and linear-optic multiqubit entangling circuits. The microresonators are engineered to locally enhance the nonlinearity, producing multiple frequencyuncorrelated and indistinguishable single-photons, without requiring any spectral filtering. The multiqubit states are processed in a programmable linear circuit facilitating Bell-projection and fusion operation in a measurement-based manner. We benchmark key functionalities, such as intra-/inter-chip teleportation of quantum states, and generation of four-photon Greenberger-HorneZeilinger entangled states. The production, control, and transceiving of states are all achieved in micrometer-scale silicon chips, fabricated by complementary metal-oxide-semiconductor processes. Our work lays the groundwork for scalable on-chip multiphoton technologies for quantum computing and communication.

Photon Conversion and Interaction on Chip

Photon Conversion and Interaction in a Quasi-Phase-Matched Microresonator

Integrated Electro-Optic Control of Biphoton Generation Using Hybrid Photonics

High Purcell Factor Generation of Indistinguishable On-Chip Single Photons

Bright and Coherent On-Chip Single Photons from a Very High Purcell Factor Photonic Crystal Cavity

Ultrabright Quantum Photon Sources on Chip

Persistent Single-Photon Production by Tunable On-Chip Micromaser with a Superconducting Quantum Circuit

Parametric down-conversion photon pair source on a nanophotonic chip

High Visibility Time-Energy Entangled Photons from a Silicon Nanophotonic Chip

On-Chip Generation and Manipulation of Entangled Photons Based on Reconfigurable Lithium-Niobate Waveguide Circuits

Quantum frequency conversion and single-photon detection with lithium niobate nanophotonic chips

A Highly Efficient and Pure Few-Photon Source on Chip

High Purcell factor generation of coherent on-chip single photons

Highly efficient and pure few-photon source on chip

Efficient and low-noise single-photon-level frequency conversion interfaces using silicon nanophotonics

Chip-scale nonlinear photonics for quantum light generation

On-Chip Enhanced Biphoton Generation with Incoherent Light

Quantum frequency conversion and strong coupling of photonic modes using four-wave mixing in integrated microresonators

Non-reciprocal nonlinear optic induced transparency and frequency conversion on a chip

Chip-to-chip quantum teleportation and multi-photon entanglement in silicon

Chip-based photon quantum state sources using nonlinear optics