Super-tetragonal Sr4Al2O7 as a sacrificial layer for high-integrity freestanding oxide membranes
Lin Gu,Er-jia Guo,Zhenlin Luo,Xiaochao Wang,Minghui Fan,Qinghua Zhang,Ting Lin,Qingyu He,Huan Ye,Wenbin Wu,Feng Jin,Zhengguo Liang,Jinfeng Zhang,Jingdi Lu,Ao Wang,Lingfei Wang,Qing Wang,S. Chen,Liang Si
DOI: https://doi.org/10.1126/science.adi6620
IF: 56.9
2024-01-26
Science
Abstract:Identifying a suitable water-soluble sacrificial layer is crucial to fabricating large-scale freestanding oxide membranes, which offer attractive functionalities and integrations with advanced semiconductor technologies. Here, we introduce a water-soluble sacrificial layer, “super-tetragonal” Sr4Al2O7 (SAOT). The low-symmetric crystal structure enables a superior capability to sustain epitaxial strain, allowing for broad tunability in lattice constants. The resultant structural coherency and defect-free interface in perovskite ABO3/SAOT heterostructures effectively restrain crack formation during the water release of freestanding oxide membranes. For a variety of nonferroelectric oxide membranes, the crack-free areas can span up to a millimeter in scale. This compelling feature, combined with the inherent high water solubility, makes SAOT a versatile and feasible sacrificial layer for producing high-quality freestanding oxide membranes, thereby boosting their potential for innovative device applications. Editor’s summary Freestanding oxide membranes have a variety of interesting applications, but pulling these materials off of the substrate after synthesis can be challenging. Zhang et al. found a new phase in the strontium aluminum oxide system capable of producing free-standing oxide films that are crack free across relatively large areas. The substrates are water soluble, allowing for an easy method with which to release the oxide films of interest. The material should enable the production of relatively high-quality films for a wide variety of potential applications. —Brent Grocholski A water-soluble substrate templates high-quality, free-standing oxide membranes.
Medicine,Materials Science,Engineering