Tailoring Mechanical and Optical Properties of Sputtered SiN x /BN Coatings

Pengyuan Wu,Tianxiang Yu,Yusi Wang,Boyang Shen,Paul C. Uzoma,Weidong Shen,Oleksiy V. Penkov
DOI: https://doi.org/10.1021/acsami.4c10220
IF: 9.5
2024-09-13
ACS Applied Materials & Interfaces
Abstract:The swift evolution of contemporary electronics products, such as flexible screens and wearable electronic devices, highlights the significance of flexible protective coatings, which combine superior mechanical and optical properties. Even though the recently developed polymer protective coatings can satisfy requirements for flexibility and transparency, their intrinsic nature often results in a hardness below 1 GPa, rendering them susceptible to scratches. On the other hand, traditional...
materials science, multidisciplinary,nanoscience & nanotechnology
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