Abstract:This work demonstrates a universal strategy for robust growth of high‐quality transition metal dichalcogenide (TMD) vertical heterostructures and a novel design concept for the fabrication of high mobility and high responsivity photodetectors based on 2D TMD vertical heterostructures, which holds promise for the next‐generation photodetectors. Two dimension (2D) transition metal dichalcogenides (TMD) heterostructures have opened unparalleled prospects for next‐generation electronic and optoelectronic applications due to their atomic‐scale thickness and distinct physical properties. The chemical vapor deposition (CVD) method is the most feasible approach to prepare 2D TMD heterostructures. However, the synthesis of 2D vertical heterostructures faces competition between in‐plane and out‐of‐plane growth, which makes it difficult to precisely control the growth of vertical heterostructures. Here, a universal and controllable strategy is reported to grow various 2D TMD vertical heterostructures through an ammonium‐assisted CVD process. The ammonium‐assisted strategy shows excellent controllability and operational simplicity to prevent interlayer diffusion/alloying and thermal decomposition of the existed TMD templates. Ab initio simulations demonstrate that the reaction between NH4Cl and MoS2 leads to the formation of MoS3 clusters, promoting the nucleation and growth of 2D MoS2 on existed 2D WS2 layer, thereby leading to the growth of vertical heterostructure. The resulting 2D WSe2/WS2 vertical heterostructure photodetectors demonstrate an outstanding optoelectronic performance, which are comparable to the performances of photodetectors fabricated from mechanically exfoliated and stacked vertical heterostructures. The ammonium‐assisted strategy for robust growth of high‐quality vertical van der Waals heterostructures will facilitate fundamental physics investigations and device applications in electronics and optoelectronics.

CVD-growth and optoelectronic characterization of 2D MoS2/ReS2 vertical heterostructures with reverse stacking sequence

Lateral and Vertical MoSe2-MoS2 Heterostructures via Epitaxial Growth: Triggered by High-Temperature Annealing and Precursor Concentration.

Direct Chemical Vapor Deposition Growth and Band-Gap Characterization of MoS2/h-BN van der Waals Heterostructures on Au Foils

In-plane and Vertical Heterostructures from 1T’/2H Transition-Metal Dichalcogenides

Controllable growth of 2H-1 T′ MoS2/ReS2 heterostructures via chemical vapor deposition

Vertical Heterostructures of Layered Metal Chalcogenides by Van Der Waals Epitaxy.

Associated Lattice and Electronic Structural Evolutions in Compressed Multilayer ReS2

Controllable Synthesis of 2H‐1T′ MoxRe(1‐x)S2 Lateral Heterostructures and Their Tunable Optoelectronic Properties

Coupling-Assisted Renormalization of Excitons and Vibrations in Compressed MoSe2–WSe2 Heterostructure

Interlayer Interactions In 2d Ws2/Mos2 Heterostructures Monolithically Grown By In Situ Physical Vapor Deposition

Engineering Anisotropy in 2D Transition Metal Dichalcogenides Via Heterostructures.

Robust Growth of 2D Transition Metal Dichalcogenide Vertical Heterostructures via Ammonium‐Assisted CVD Strategy

Evolution of Two-Dimensional Mo1–xWxS2 Alloy-Based Vertical Heterostructures with Various Composition Ranges Via Manipulating the Mo/W Precursors

Epitaxial Growth of Two-Dimensional Metal-Semiconductor Transition-Metal Dichalcogenide Vertical Stacks (vse2/mx2) and Their Band Alignments.

Preparation and optoelectronic performance of two-dimensional MoSe2/WSe2 lateral and vertical heterostructures

Two Step Chemical Vapor Deposition of In2se3/Mose2 Van Der Waals Heterostructures

Temperature-Dependent Two-Dimensional Transition Metal Dichalcogenide Heterostructures: Controlled Synthesis and Their Properties

Anisotropic Growth of Nonlayered CdS on MoS2 Monolayer for Functional Vertical Heterostructures

Direct Vapor Phase Growth and Optoelectronic Application of Large Band Offset Sns2/Mos2 Vertical Bilayer Heterostructures with High Lattice Mismatch

Synthesis and Spectral Characteristics Investigation of the 2D-2D vdWs Heterostructure Materials

Recent progress in the synthesis and physical properties of 2D ternary TMDC-based vertical heterostructures