Broadband multilayer polarizers for the extreme ultraviolet

Zhanshan Wang,Hongchang Wang,Jingtao Zhu,Fengli Wang,Zhongxiang Gu,Lingyan Chen,Alan G. Michette,A. Keith Powell,Sławka J. Pfauntsch,Franz Schäfers
DOI: https://doi.org/10.1063/1.2179152
IF: 2.877
2006-03-01
Journal of Applied Physics
Abstract:Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. Their performances have been characterized using the high precision eight-axis soft x-ray polarimeter at the BESSY facility. Different multilayers have measured s-polarized reflectivities of 27% at 13.1nm and higher than 15% over the wavelength range of 13–19nm. Nearly constant s reflectivity, up to 37%, is observed over the 15–17nm wavelength range, where the degree of polarization is more than 98%. Furthermore, these multilayer polarizers also show high s reflectivity and polarization over a broad angular range at fixed wavelength.
physics, applied
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