Abstract:Extreme ultraviolet (EUV) light source is an important part of EUV lithography system in semiconductor manufacturing. The EUV light source requires that the 4p 6 4d n -4p 5 4d n +1 + 4d n -1 4f transitions of Sn 8+~13+ ions emit thousands of lines which form unresolved transition arrays near 13.5 nm. Laser-induced discharge plasma is one of the important technical means to excite target into an appropriate plasma condition. Laser-induced discharge plasma has a simple structure and a low cost. It also has important applications in mask inspection, microscopic imaging, and spectral metrology. In the design and production process, there are many factors that can influence the conversion efficiency, such as current, electrode shape, and laser power density. The simulation method is a convenient way to provide guidance for optimizing the parameters. In this paper, a completed radiation magneto-hydrodynamic model is used to explore the dynamic characteristics of laser-induced discharge plasma and its EUV radiation characteristics. To improve the accuracy, a more detailed global equation of state model, an atomic structure calculation model including relativistic effect and a collision radiation model are proposed simultaneously. The simulation reconstructs the discharge process effectively, which is divided into five stages in the first half cycle of current, including expansion of laser plasma, column formation of discharge plasma, diffusion of discharge plasma, contraction of discharge plasma, and re-diffusion of discharge plasma. It is revealed that the pinch effect during the current rising time exerts a significant influence on the generation of EUV radiation. The conversion efficiency of EUV radiation is still low under our existing conditions, and hopefully a higher rising rate of current can improve the conversion efficiency in the future work.

Analysis of extreme ultraviolet radiation and hydrodynamics simulation at the core of laser-produced nickel plasmas

Kinetic Investigations of Nonlinear Electrostatic Excitations in Quantum Plasmas.

Reconstruction and analysis of transient evolution images of laser-produced plasma plumes

Studies of Hot Electrons and Protons Generated from Micro Droplet Plasmas Irradiated by Ultrashort Laser Pulses

Simulation of High Power Thz Emission from Laser Interaction with Tenuous Plasma and Gas Targets

Comprehensive researches on dynamics of nanosecond laser produced plasmas

Simulation of extreme ultraviolet radiation of laser induced discharge plasma

Radiation from Laser-Microplasma-waveguide Interactions in the Ultra-Intense Regime

Intense Laser-Driven Electrostatic Shocks and Its Acceleration of Ions in Overdense Plasmas

Correlation between macroscopic plasma dynamics and electron beam parameters in a laser-plasma accelerator

Dynamics of Nanosecond Laser Produced Plasma

Three-dimensional Particle-in-cell Simulations of Energetic Electron Generation and Transport with Relativistic Laser Pulses in Overdense Plasmas

Post-solitons and Electron Vortices Generated by Femtosecond Intense Laser Interacting with Uniform Near-Critical-density Plasmas

Simulation of Laser Interaction with Ablative Plasma and Hydrodynamic Behavior of Laser Supported Plasma

Numerical study of the interaction between high-intensity ultrashort laser and overdense plasma

Relativistic Electron Heating in Laser-Produced Plasmas

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

High-Mach Number Collisionless Shock and Photo-Ionized Non-Lte Plasma for Laboratory Astrophysics with Intense Lasers

Generation of Extreme-Ultraviolet and X-Ray Light from a Propagating Nanometer Electron Layer in Few-Cycle Laser Interaction with Solid Targets

Effects of Ponderomotive Forces and Space-Charge Field on Laser Plasma Hydrodynamics

Ultraintense Laser Absorption and Γ-Ray Synchrotron Radiation in Near Critical Density Plasmas