Detection and Metrology of Micro-Nano Particles through the Integration of Image and Laser Modes

Yikun Tao,Hu He,taoyikun taoyikun
DOI: https://doi.org/10.1088/1361-6501/ad3a8c
IF: 2.398
2024-04-05
Measurement Science and Technology
Abstract:Micro-nano particles, indispensable components in various industrial and scientific applications, exhibit size-dependent properties. Accurate granular information is critical for manufacturing products involving these particles. This study presents a novel detection method that merges image and laser modes to achieve precise size and shape determination of micro-nano particles. The proposed method integrates adaptive image analysis with laser particle size fitting to ensure accurate feature detection. Experimental results using polystyrene samples demonstrate that the fusion mode outperforms both the laser and image modes in terms of size and shape accuracy. The errors of D10, D50, and D90 of the fusion mode are 3.9%, 1%, and 11.36%, respectively, which are significantly lower than those obtained using the laser or image mode alone. Additionally, the fusion mode retains the particle shape information from the image mode. The fusion model offers a promising approach for dual-mode detection of micro-nano particles, demonstrating enhanced robustness compared to single-mode methods. Furthermore, the study introduces an image processing method based on a BP neural network classification model that accurately classifies and detects agglomerated and non-agglomerated particles. The classification accuracy reaches 94.98%, and the particle size information remains within the acceptable range.
engineering, multidisciplinary,instruments & instrumentation
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