Integrated silicon metasurface polarization beam splitter on a standard SOI substrate

Yuanhe Sun,Lei Zhang,Huijuan Xia,Shuqi Cao,Lin Wang,Shumin Yang,Yanqing Wu,Renzhong Tai
DOI: https://doi.org/10.1016/j.ijleo.2020.166096
IF: 3.1
2021-02-01
Optik
Abstract:<p>Polarization beam splitters are indispensable components in on-chip polarization-division-multiplexing systems. We propose a compact integrated polarization beam splitter based on a metasurface structure with a 300 nm periodic silicon column array with a variable duty cycle on a silicon-on-insulator substrate. Simulation results indicate a low insertion loss, high extinction ratio, and a 6×12 μm2 footprint within the C+L band. The robustness of our device with respect to manufacturing tolerance and nonideal input light has also been confirmed. The proposed polarization beam splitter can be fabricated in a single lithography step with input/output waveguides, which will be advantageous for device fabrication.</p>
optics
What problem does this paper attempt to address?