Polystyrene microspheres with ultra-rough surfaces engineered using RIE technique and applied using SERS

Jizhe Song,Sujuan Feng,Haonan Shi,Daotong Han,Guangqiang Liu
DOI: https://doi.org/10.1039/d3cc05940e
IF: 4.9
2024-02-03
Chemical Communications
Abstract:In this study, we successfully fabricated two ultra-rough surfaces based on polystyrene (PS) microspheres by employing the reactive ion etching (RIE) technique. Elemental analysis confirmed a stable AlF 3 composition of the structures of these surfaces. We proposed the mechanism of the formation of these surfaces and performed SERS-related tests; the prepared substrates exhibited excellent SERS performance.
chemistry, multidisciplinary
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