Abstract:White light interferometry (WLI) is a fast nanoscale surface measurement method suitable for measuring the quality of machined surfaces. In this study, a miniaturized WLI integrated into a machining system was developed for limited measurement spaces and a new anti-vibration algorithm for in situ WLI was studied. Closed-loop quality control experiments were conducted for the V-groove machining process using in situ WLI. Blank tin workpieces were turned and measured, demonstrating an in situ roughness measurement error of less than 0.7 nm compared to that of commercial WLI. The best cutting parameters were determined using in situ WLI and tool posture deviation was successfully monitored. Using local functional surface extraction, the roughness of the fine-cut V-groove and tool posture deviation were reduced to no more than 5 nm and 0.032°, respectively, thus providing effective tool posture monitoring and closed-loop quality control of microscopic topography.

Research on the quality control technology of micro-topography machining based on in situ white light interferometry