Abstract:Geometric dispersion in integrated microresonators plays a major role in nonlinear optics applications, especially at short wavelengths, to compensate the natural material normal dispersion. Tailoring of geometric confinement allows for anomalous dispersion, which in particular enables the formation of microcombs which can be tuned into the dissipative Kerr soliton (DKS) regime. Due to processes like soliton-induced dispersive wave generation, broadband DKS combs are particularly sensitive to higher-order dispersion, which in turn is sensitive to the ring dimensions at the nanometer-level. For microrings exhibiting a rectangular cross section, the ring width and thickness are the two main control parameters to achieve the targeted dispersion. The former can be easily varied through parameter variation within the lithography mask, yet the latter is defined by the film thickness during growth of the starting material stack, and can show a significant variation (few percent of the total thickness) over a single wafer. In this letter, we demonstrate that controlled dry-etching allows for fine tuning of the device layer (silicon nitride) thickness at the wafer level, allowing multi-project wafers targeting different wavelength bands, and post-fabrication trimming in air-clad ring devices. We demonstrate that such dry etching does not significantly affect either the silicon nitride surface roughness or the optical quality of the devices, thereby enabling fine tuning of the dispersion and the spectral shape of the resulting DKS states.

Dispersion tailoring in wedge microcavities for Kerr comb generation

Dispersion tailoring of a crystalline whispering gallery mode microcavity for optical Kerr frequency comb generation

Tailoring microcombs with inverse-designed, meta-dispersion microresonators

Dispersion engineering and measurement of whispering gallery mode microresonator for Kerr frequency comb generation

Structure-Induced Hyperbolic Dispersion in Waveguides

Dispersion engineering in a Brillouin fiber laser cavity for Kerr frequency comb formation

A Mechanically Tuned Kerr Comb in a Dispersion-Engineered Silica Microbubble Resonator

Kerr Frequency Comb Generation in Microsphere Resonators with Normal Dispersion

Visible Kerr Comb Generation in a High-Q Silica Microdisk Resonator with a Large Wedge Angle

Microcavity dispersion engineering for the visible optical frequency comb generation

Dissipative solitons and switching waves in dispersion folded Kerr cavities

Frequency comb generation in a pulse-pumped normal dispersion Kerr mini-resonator

Tailoring Broadband Kerr Soliton Microcombs via Post-Fabrication Tuning of the Geometric Dispersion

Generation of two-cycle pulses and octave-spanning frequency combs in a dispersion-flattened micro-resonator.

Adjustable Repetition Rate Kerr Frequency Combs in an Integrated Silica Microring

Normal-dispersion Microresonator Kerr Frequency Combs

On the dispersion management of fluorite whispering-gallery mode resonators for Kerr optical frequency comb generation in the telecom and mid-infrared range

Stretching the Spectra of Kerr Frequency Combs with Self-Adaptive Boundary Silicon Waveguides

Tailored Multi-Color Dispersive Wave Formation in Quasi-Phase-Matched Exposed Core Fibers

Normal-dispersion microcombs enabled by controllable mode interactions