Fabrication and Characterization of High-Mobility Solution-Based Chalcogenide Thin-Film Transistors

Israel Mejia,A. Salas-Villaseñor,D. Cha,H. Alshareef,Bruce E. Gnade,M. Quevedo-López
DOI: https://doi.org/10.1109/TED.2012.2228200
IF: 3.1
IEEE Transactions on Electron Devices
Abstract:We report device and material considerations for the fabrication of high-mobility thin-film transistors (TFTs) compatible with large-area and inexpensive processes. In particular, this paper reports photolithographically defined n-type TFTs (n-TFTs) based on cadmium sulfide (CdS) films deposited using solution-based techniques. The integration process consists of four mask levels with a maximum processing temperature of 100°C. The TFT performance was analyzed in terms of the CdS semiconductor thickness and as a function of postdeposition annealing in a reducing ambient. The Ion/Ioff ratios are ~107 with field-effect mobilities of ~5.3 and ~4.7 cm2/V · s for Al and Au source-drain contacts, respectively, using 70 nm of CdS. Transmission electron microscopy and electron energy loss spectroscopy were used to analyze the CdS-metal interfaces.
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